S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン Revision:SEMI S6-0618 - Current 1 This Standard applies to

1  This Standard applies to data collection related to the portion of equipment recipe execution that directly affects the processing locations (process modules and process areas) within production equipment

MEMS components

their hazards

orgで入手可能となる。初版は1991年，前版は 2007年3月に出版された。

S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン Revision:SEMI S6-0618 - Current 1 This Standard applies toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SME 8 Referenced SEMI Standards (purchase separately) SEMI F5 Guide for Gaseous Effluent Handling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S14 Safety Guidelines for Fire Risk